Airco Temescal Cv 8 Manual
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Description Airco Temescal FC-1800 EvaporatorPhotos: DownloadOEM: Airco TemescalModel: Temescal FC-1800 EvaporatorDescription: Airco Temescal FC-1800 Evaporator System with Airco Temescal HV CNTL 14 (SN 175), Serial Number 210, To Include: Power Supply, Control Panel, CTI-Cryopump 8, Part Number 3543811G004, Serial Number Location:San Jose, CA, U.S.A.Please contact us for the availability of the following used semiconductor equipment and parts.Pls use “ CTRL+F “key button to search the model/ key word you are interested inThe items are subject to prior sale without notice. These items are only for end users. 14-way Skinner Electric Pneumatic Valve 115v MODEL-V935DX18 Airco Temescal 4″27766 Airco Temescal 2 Inch 5010 Aluminum Valve H-823Airco / Temescal Model: 8008 Wired Controller. Unused Old Stock 152Temescal VES 2550 Rebuilt Vacuum System153Temescal VES 2550 With New Process Controller154Temescal VES-2550 E-Beam Evaporation System with 2 Four Pocket E-Guns155Temescal Water Company et al., Petitioners, v.
Convertible Bell Jar for Small-Scale Production and R&D ApplicationsTemescal’s BJD-2000 and FC-2000 are versatile evaporation systems that accept a variety of accessories to meet almost any requirement. Engineered for efficient operation and clean room compatibility, these systems combine maximum flexibility with ease of use. The FC-2000 is a fast- cycle, load-locked system that allows the source to remain under vacuum during substrate reloading. The BJD-2000 is non-load-locked. Convenient MaintenanceThe offset pumping port, the hinged door panels, and the swingout source tray are high-value maintenance features in Temescal bell-jar systems. The offset pumping design reduces unscheduled downtime by minimizing the possibility of debris entering the pumping module. The hinged door panels open to the pumping system and the vacuum chamber.
The electric hoist and the swing-out source tray facilitate access for evaporant reloading, cleaning, and maintenance. Access to the water manifold, the bellows-sealed high-vacuum valve, and other pumping system components is also simple and direct. System.
University, R&D, Pilot Production. Product Chamber Type: bell jar. FC-2000 Load lock to isolate Product Chamber.
Cryopump water L/sec: 4,000. FC-2000 Pump down time: 1E-06 60 cfm (102 m3/h). CTI On-Board Cryopumps. Cryopump temperature monitoring. Active Inverted Magnetron gauges and Pirani controllers, monitored and controlled by the TCS. The TCS Automatic ModeAuto mode operation provides fully automated execution of user-programmed recipes consisting of up to twenty process steps, as well as full abort diagnostics.
The TCS Auto Mode also offers independent autopump and autovent operations, automated cryopump regeneration, and automated rate-of-rise testing. Manual Mode OperationThe TCS manual mode enables the user to set process parameters, operate major components and subsystems individually with full interlock protection, and execute nonautomated single-film deposition processes. Service Mode OperationThe TCS service mode provides noninterlocked low-level control over any of the system’s valves, pumps, motors, or power supplies. System control. SECS/GEM interface to TCS.
Chamber temperature monitoring. TCS-controlled auto-blowdown for turret source. TCS simulator for off-line training and process development.
A second XTC/3 deposition controller to support codepositionElectron beam source, power supply and sweep. Upgrade to Temescal’s PopTop source. Up to three resistance sources. 8-in. Source well extension collar.
One additional fixed e-beam source. One wire feeder on dual-source systems. Dual wire feeders on single-source systems. A second SS64 programmable beam sweep controller.